| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a necessary dehumidification amount or a necessary heating amount of carrier air sending hydrogen peroxide vapor into a decontamination target chamber. <P>SOLUTION: The decontamination device includes a vapor generation means 8 evaporating hydrogen peroxide water Wh inside the carrier air CA to generate the hydrogen peroxide vapor Sh. The decontamination device also includes a concentration means 15 increasing concentration of the hydrogen peroxide water Wh supplied from a liquid tank 10 in a supply process of the hydrogen peroxide water Wh to the vapor generation means 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
