摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scanner using magnetic force, capable of obtaining sufficient driving force with a simple structure. <P>SOLUTION: A mirror portion 10, a frame portion 20, and pair of torsion bars 11 for supporting the mirror portion 10 and frame portion 20, and so on are integrally formed from a magnetic thin film. A driving torque for reciprocally vibrating the mirror portion having the torsion bars 11 as an axis of rotation is generated by the magnetic force including AC magnetic field applied from outside and the magnetization component of the mirror portion 10. A portion 12 connecting the torsion bars 11 and frame portion 20 may be non-magnetic or weakly-magnetic. <P>COPYRIGHT: (C)2012,JPO&INPIT |