发明名称 CMOS INTEGRATION METHOD FOR OPTIMAL IO TRANSISTOR VT
摘要 Various embodiments provide methods for fabricating dual supply voltage CMOS devices with a desired I/O transistor threshold voltage. The dual supply voltage CMOS devices can be fabricated in a semiconductor substrate that includes isolated regions for a logic NMOS transistor, a logic PMOS transistor, an I/O NMOS transistor, and an I/O PMOS transistor. Specifically, the fabrication can first set and/or adjust the threshold voltage (VT) of each of the I/O NMOS transistor and the I/O PMOS transistor to a desired level. Logic NMOS and logic PMOS transistors can then be formed with I/O NMOS and I/O PMOS transistors masked without affecting the set/adjusted VT of the I/O transistors.
申请公布号 US2012045874(A1) 申请公布日期 2012.02.23
申请号 US20100857954 申请日期 2010.08.17
申请人 XIONG WEIZE;BALDWIN GREG CHARLES 发明人 XIONG WEIZE;BALDWIN GREG CHARLES
分类号 H01L21/8238 主分类号 H01L21/8238
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