| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a static pressure gas bearing spindle which is provided with a cooling structure which cools heat generated from a driving motor of the spindle, a spindle bearing portion or the like efficiently and keeps vacuum environment at desired cleanliuess by restraining outgassing etc. from generating to the vacuum environment of outside, and at can prevent a seal member from deteriorating. <P>SOLUTION: The static pressure gas bearing spindle is provided with a rotary shaft 2, a static pressure gas bearing 3 which supports the rotary shaft 2 and rotatably supports it around its axis and a motor 4. The static pressure gas bearing spindle is provided with flow passages 33, 35, through which coolant circulates, between a surface of housing bodies 1A, 1B and blockage members 32, 34 which are overlapped on the surface of the housing bodies and is provided with seal members 42a, 42b, 50a, 50b, which seal the flow passages 33, 35 by interposing between both overlapping surfaces, in double structure which lines up inside and outside the flow passages 33, 35. The static pressure gas bearing spindle is configured so as to make material of two seal members 42a, 42b, 50a, 50b distinct from each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
