| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct an error of a processing position of a workpiece, and to correct each error small as a whole even if errors of different magnitudes occur in a plurality of places on the workpiece. <P>SOLUTION: In the correction matrix derivation device 20, an operation part 26 performs first weighting factor reconfiguration re-configuring the weighting factor G of a first maximum alienation reference point selected on the basis of the coordinates after a first correction conversion by a temporary correction matrix by a given increment g1; and performs the second correction matrix calculation operation of a correction matrix which is the correction matrix for correction conversion of the reference coordinates of respective reference points 100a, and calculates the correction matrix in which a value obtained by adding a value obtained by multiplying the weighting factor G of the respective reference points 100a to a squared value of the distance between the coordinates after the correction conversion of the reference coordinates of the respective reference points 100a by the correction matrix and the corresponding measured coordinates for all the reference points 100a, becomes the minimum by the method of a least square. <P>COPYRIGHT: (C)2012,JPO&INPIT |
