| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method capable of accurately and easily manufacturing a highly-reliable piezoelectric element and the like. <P>SOLUTION: The manufacturing method of the piezoelectric element comprises: a step of forming a first conductive layer on a substrate; a step of forming a piezoelectric layer on the first conductive layer; a step of forming a second conductive layer on the piezoelectric layer; a step of forming a third conductive layer on the second conductive layer; a step of patterning the third conductive layer and forming a first portion, a second portion, and an opening provided between the first portion and the second portion; a step of covering the opening and forming a resist layer covering a peripheral part of the opening side between the first portion and the second portion; and a step of dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask and forming a first conductive part and a second conductive part each of which consists of the first portion and the second portion and a third conductive part consisting of the second conductive layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
