发明名称 |
Electrostatic Chuck With Polymer Protrusions |
摘要 |
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.
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申请公布号 |
US2012044609(A1) |
申请公布日期 |
2012.02.23 |
申请号 |
US201013266657 |
申请日期 |
2010.05.13 |
申请人 |
COOKE RICHARD A.;RICHARD NATE;DONNELL STEVEN;VOSE MARK;LIU YAN |
发明人 |
COOKE RICHARD A.;RICHARD NATE;DONNELL STEVEN;VOSE MARK;LIU YAN |
分类号 |
H02N13/00;C23F1/00 |
主分类号 |
H02N13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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