MICROLENS ARRAY MANUFACTURING METHOD AND MICROLENS ARRAY

摘要

A method for manufacturing a microlens array includes: a step (A) for forming, on one surface of a silicon substrate, an organic film layer which is to be a material layer of a microlens, and a resist layer which is for forming the shape of the microlens; and an etching step (C) for etching the resist layer and the organic film layer by providing a gas mixture containing etching gas and deposition gas, setting the pressure to 100 mTorr or more, and setting the bias power applied to the silicon substrate to 200 W or less.