| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon electromagnetic casting apparatus that prevents changes in a temperature environment in a heat insulating device to perform stable operation and can produce polycrystalline silicon that is free from contamination by metal impurities and is suitable as a substrate material for a solar cell. <P>SOLUTION: This silicon electromagnetic casting apparatus includes: a bottomless cooling mold; an induction coil for heating; and a heat insulating device that is disposed under the mold and anneals the solidified silicon. The silicon electromagnetic casting apparatus pulls down and solidifies silicon melted by electromagnetic induction heating by the induction coil. A heat insulating board 8 made by mounting a heat insulating material 8b on a carbon fiber material 8a is disposed in a gap between the mold 1 and an outer frame 6 of a heat insulating device 3. Desirably the carbon fiber material is cut at least one position. In place of the carbon fiber material, a member made from silicon carbide or alumina may be used. <P>COPYRIGHT: (C)2012,JPO&INPIT |
