| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic casting apparatus of a silicon ingot, which prevents contacting of a silicon raw material with a plasma torch involved in charge of the silicon raw material in a cooled crucible, suppresses metal impurity contamination of a molten silicon, and can stabilize melting of the silicon raw material. <P>SOLUTION: In the electromagnetic casting apparatus in which a silicon raw material 11 is charged in a conductive non-bottomed cooled crucible 7 through a raw material introduction pipe 10; the silicon raw material is melted by electromagnetic induction heating by an induction coil 8 surrounding the cooled crucible 7 and plasma arc heating by a plasma torch 13 inserted in the upper part of the cooling crucible 7; and the molten silicon 12 is pulled down from the cooled crucible 7 to be solidified to thereby continuously cast a silicon ingot 3, a through-hole 7c is formed in a side wall of the cooled crucible 7, and the raw material introduction pipe 10 is connected to the through-hole 7c. <P>COPYRIGHT: (C)2012,JPO&INPIT |
