| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass-substrate conveying device allowing a glass substrate to get fewer scratches due to conveyance than ever. <P>SOLUTION: The glass-substrate conveying device 100 conveys the glass substrate in an approximately horizontal state in a glass-substrate cleaning step. The glass substrate conveying device includes rotating shafts 101, a driving part, and a ring member 102. The j rotating shafts 101 (j is an integer equal to or greater than 4) are provided. The rotating shafts 101 are juxtaposed in order of the first, the second, ..., the j-th rotating shaft 101 to a carrying-out side from a carrying-in side. The ring member 102 is disposed to be put into a first state. The first state is the state in which: the ring member 102 is not mounted on points P1 and P2 where each of straight lines L1, L2 and the m-th rotating shaft 101 (m is an integer greater than 2 and smaller than j) are orthogonal to each other; and the one ring member 102 is mounted between the points P1 and P2 on the m-th rotating shaft 101. <P>COPYRIGHT: (C)2012,JPO&INPIT |
