APPARATUS AND METHOD FOR MANUFACTURING POWER MODULE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To facilitate the manufacturing of a power module substrate by using a cushion sheet which is repetitively used and has excellent handleability.

SOLUTION: A manufacturing apparatus 100 includes: a pressure device 110 pressurizing stacked multiple laminates 101, each of which is formed by laminating a ceramic substrate 20 and metal plates 30 and 40 with a first brazing material 11 disposed therebetween, in the thickness direction; and a cushion sheet 120 which is formed by brazing carbon sheets 122 on both sides of a graphite sheet 121 with a second brazing material 123 and is placed between the stacked multiple laminates 101. The manufacturing apparatus 100 brazes the ceramic substrate 20 and the metal plates 30 and 40.

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