| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a control system capable of corresponding to the speed variation or the like of a motor with high accuracy without making a sampling period small, and a position estimation method used in the control system. <P>SOLUTION: In a control system 1 having a second motor 43, a second encoder 44 for detecting position data on a notch of a wafer based on the rotation angle of the second motor 43 in a predetermined cycle, a servo controller 32 for performing servo control of the second motor 43, and a position control unit 2 for issuing an operation command to the servo controller 32, the position control unit 2 generates the operation command of the servo controller 32, stores the position data acquired from the second encoder 44 together with an acquisition time in a predetermined cycle, represents a position f(t) of a body to be controlled at a time t with an n-th polynomial expression on the basis of the position data, and estimates the position of a wafer (notch) at an optional time by an n-th polynomial interpolation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
