| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate evaluation method by which a part where an insulation defect of a test pattern occurs, of an inner layer in a substrate in which test patterns are stacked into multiple layers. <P>SOLUTION: The present invention relates to a substrate in which multiple layers are stacked, including a test pattern layer in an inner layer. The test pattern layer includes a comb-shaped first test pattern, and a second test pattern with no branch arranged between first test patterns. A substrate evaluation method includes: a preparation step for preparing the substrate; a voltage application step for applying a voltage between the first test pattern and the second test pattern; and an evaluation step for evaluating an insulation property of the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
