| 摘要 |
A variable resistance nonvolatile storage device which includes (i) a semiconductor substrate (301), (ii) a variable resistance element (309) having: lower and upper electrodes (309a, 309c); and a variable resistance layer (309b) whose resistance value reversibly varies based on voltage signals each of which has a different polarity and is applied between the electrodes (309a, 309c), and (iii) a MOS transistor (317) formed on the substrate (301), wherein the variable resistance layer (309b) includes: oxygen-deficient transition metal oxide layers (309b-1, 309b-2) having compositions MOx and MOy (where x<y) and in contact with the electrodes (309a, 309c) respectively, and a diffusion layer region (302b) is connected with the lower electrode (309a) to form a memory cell (300), the region (302b) serving as a drain of the transistor (317) upon application of a voltage signal which causes a resistance change to high resistance state in the variable resistance layer (309b).
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