| 摘要 |
An apparatus (9) for plasma treating multiple containers. The apparatus includes a manifold (2) comprising at least a first chamber with multiple outlet openings and multiple hollow, electrically-conductive nozzles (10) for at least one of delivering or exhausting plasma-generating gas. The multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the manifold. A method of plasma treating multiple containers is also disclosed. The method includes providing a reactor system comprising an apparatus disclosed herein, inserting the multiple hollow, electrically-conductive nozzles into the multiple containers (30), evacuating the multiple containers, grounding the multiple hollow, electrically-conductive nozzles while applying radio frequency power to the multiple containers, providing a gas inside the containers, and generating a plasma. At least one of evacuating or providing the gas is carried out through the hollow, electrically-conductive nozzles. |
