Sensor for microelectromechanical system capacitor microphone used in e.g. medical field, has sound passage openings arranged anisotropically on counter electrode such that reduction of lateral forces on counter electrode is achieved

摘要

The sensor has a movable membrane, a movable diaphragm, and a counter-electrode. The sound passage openings (7) are arranged anisotropically on the counter electrode such that the reduction of the lateral forces on the counter electrode is achieved.