METHOD FOR PASSIVATING SILICON SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a method for passivating a silicon surface which provides excellent passivation quality on the silicon surface.

SOLUTION: A method for passivating a silicon surface includes: (a) a step of cleaning the silicon surface including a step of subjecting the silicon surface to a sequence of steps wherein the final step is a chemical oxidation step resulting in a hydrophilic silicon surface; (b) a step of drying the cleaned silicon surface using an advanced drying technique; and (c) a step of depositing an oxide layer such as an ALDAl2O3layer on the silicon surface.

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