| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a camera having improved electron detection. <P>SOLUTION: In a direct electron detector, backscattering of electrons into the detector volume from below a sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes a geometric structure having multiple high aspect-ratio channels extending to or from the sensor or having angled surfaces to detect electrons that pass through the sensor. <P>COPYRIGHT: (C)2012,JPO&INPIT |
