发明名称 SEMICONDUCTOR CIRCUIT BOARD AND MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor circuit board, a manufacturing method thereof, and a semiconductor device, which are capable of obtaining a high-performance semiconductor element using a compound semiconductor while reducing the amount of a compound semiconductor material. <P>SOLUTION: A semiconductor circuit board has a transistor formed substrate 10 and a circuit formed substrate 50. The transistor formed substrate 10 is a GaN substrate, and a BJT40 is formed on its surface. The rear face of the transistor formed substrate 10 is smooth and has a contact region. The circuit formed substrate 50 is composed of a material other than a compound semiconductor, and has no semiconductor active element. The circuit formed substrate 50 has a smooth surface, contact regions 52 and 54 embedded so as to be exposed from the surface, and a passive circuit (not shown). The transistor formed substrate 10 and the circuit formed substrate 50 are directly connected to each other without interposing a film such as an insulating film. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012038951(A) 申请公布日期 2012.02.23
申请号 JP20100178431 申请日期 2010.08.09
申请人 MITSUBISHI ELECTRIC CORP 发明人
分类号 H01L27/00;H01L21/331;H01L21/822;H01L23/12;H01L25/10;H01L25/11;H01L25/18;H01L27/04;H01L29/737 主分类号 H01L27/00
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