| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection device and a surface inspection method capable of improving the certainty of detection of a hole defect. <P>SOLUTION: The surface inspection device 1 for inspecting the hole defect of an object 10 to be inspected by image processing includes: imaging means 2 for imaging the object 10 to be inspected; binarization means for binarizing a picked-up image picked up by the imaging means 2; and determination means for determining the presence/absence of the hole defect of the object 10 to be inspected. The binarization means calculates a binary image with respective luminance values to be changed corresponding to setting as references, and the determination means determines the presence/absence of the hole defect on the basis of the plurality of binary images binarized by the different luminance values. <P>COPYRIGHT: (C)2012,JPO&INPIT |
