| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ionization vacuum gauge for further reducing gas discharge amounts due to electron stimulated desorption (ESD). <P>SOLUTION: The ionization vacuum gauge includes: an axial ion collector 1; a coil-shaped grid 2 installed in the periphery of the radial direction of the icon collector 1; a thermoelectron discharge filament 3 installed outside the grid 2; and a support post part 6 configured to give support while securing conduction with the grid 2. The ionization vacuum gauge includes a coating 16a configured to coat the surface of the support post part 6 opposite to the grid 2 and the filament 3 in the radial direction of the ion collector 1, and held to a potential which is lower than that of the filament 3. Thus, it is possible to prevent gas discharge due to the ESD from the surface of the support post part 6. <P>COPYRIGHT: (C)2012,JPO&INPIT |
