摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid jetting head in which the amount of liquid to be jetted is stabilized by increasing the amount of displacement of a piezoelectric actuator and reducing variation in the vibration characteristics of each piezoelectric actuator between liquid jetting heads or in a liquid jetting head, and to provide a liquid jetting device. <P>SOLUTION: The force to prevent the deformation of a piezoelectric layer 70 becomes weak as compared with the constitution of a first upper electrode single layer because the Young modulus of tungsten, molybdenum, aluminum, and magnesium included in second upper electrodes 82 is small as compared with the Young modulus of iridium of first upper electrodes 81. Consequently, the piezoelectric layer 70 can be easily deformed, thus obtaining a piezoelectric actuator 310 with a large amount of deformation. <P>COPYRIGHT: (C)2012,JPO&INPIT |