摘要 |
A microscope according to the present invention includes an imaging unit including a first illuminating unit, an imaging element, and a projection optical system, the first illuminating unit including a light source that illuminates a first object, the imaging element performing imaging of the first object, the projection optical system projecting an image of the first object onto the imaging element; a measuring unit configured to measure a second object for setting an imaging condition used when performing imaging of the second object at the imaging unit; and a controller configured to concurrently perform the imaging of the first object at the imaging unit and the measurement of the second object at the measuring unit. |
申请人 |
CANON KABUSHIKI KAISHA;YANO, MASASHI;FUJII, HIROFUMI;YANAGISAWA, MICHIO;TOKUDA, YUKIO |
发明人 |
YANO, MASASHI;FUJII, HIROFUMI;YANAGISAWA, MICHIO;TOKUDA, YUKIO |