| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electro Mechanical Systems) device which can be manufactured by a simple manufacturing method and reduce influence on a characteristic of a MEMS element, and a method for manufacturing the MEMS device. <P>SOLUTION: The MEMS device includes: a substrate; the MEMS element arranged on the substrate; a case covering the MEMS element and securing a space between the case and the MEMS element; and a sealing material arranged by exposing at least one part of an upper surface of the case at a position where the substrate is brought into contact with or close to the case. This method is provided to manufacture the MEMS device in which the MEMS element is arranged on the substrate, the MEMS element is covered with the case, a space is secured between the MEMS element and the case, and the sealing material is formed by exposing at least a part of the upper surface of the case at the position where the substrate is brought into contact with or close to the case. <P>COPYRIGHT: (C)2012,JPO&INPIT |
