| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wire bonding device which can easily supply stable supersonic vibration while maintaining the temperature of a wire at a high level. <P>SOLUTION: A horn 3 propagates supersonic vibration generated from a vibration element 2 to a capillary 6 attached to a end 3b. The horn 3 is provided, in the end 3b near the capillary 6, with a heater 3a which heats the horn 3 from the inside under control of a heater control unit 4. The heater 3a is formed to cover the section of the rod-like horn 3 in the width direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
