THIN FILM MEMBRANE STRUCTURE AND SEMICONDUCTOR-TYPE THIN FILM GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To further improve retainability of a thin film membrane while improving thermal insulation of the thin film membrane, when mounting a sensor including a heater in a thin film membrane structure.

SOLUTION: A thin film membrane structure 10 includes a thin film membrane 20 and a holding substrate 30 holding the thin film membrane 20. The holding substrate 30 includes a peripheral wall part holding a peripheral edge of a holding surface as which one of top and bottom surfaces of the thin film membrane 20 is taken, an inside holding part holding the holding surface of the thin film membrane in at least one position of an inside part being the inside of the peripheral edge of the thin film membrane 20, and a connection part having a space 31 between the connection part itself and the holding surface of the thin film membrane while connecting the peripheral wall part and the inside holding part.

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