| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the useful service life of a diaphragm by improving fatigue strength of a corrosion resistant metallic material being a raw material of the diaphragm and improving corrosion resistance by reducing the grain boundary concentration of an impurity included in the material. <P>SOLUTION: This diaphragm 3 for a compressor including the corrosion resistant metallic material is sandwiched by a gas plate 1 and an orifice plate 2 having mutually opposed recesses 4 and 5, and is characterized in that an average crystal grain size d(mm) of the metallic material satisfies the following (1) expression. (1): 1/d<SP POS="POST">0.5</SP>≥15. <P>COPYRIGHT: (C)2012,JPO&INPIT |
