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经营范围
发明名称
SUBSTRATE TREATMENT TANK
摘要
申请公布号
JPH10163157(A)
申请公布日期
1998.06.19
申请号
JP19960315277
申请日期
1996.11.26
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
SUHARA TADAHIRO;TANAKA MASATO
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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