SUBSTRATE STORAGE SYSTEM AND AIR CURRENT CONTROL METHOD FOR THE SAME

摘要

PURPOSE: A substrate storing system and an air current control method therefor are provided to prevent contaminant generated in process equipment or a loader to be spread to the inside of a stoker by controlling a reverse air current facing to the stoker from the loader. CONSTITUTION: A loader(130) is located between process equipment(110) and a stoker(150). The loader comprises a body(131), a fan filter unit(132), and a grating. A loader port(160) in which a cassette is placed is located between the loader and the stoker. An air current control apparatus(140) comprises a current speed sensor(141), a fan filter unit controller(142), and a controller(143). The current speed sensor senses a reverse air current between the stoker and the loader. The fan filter unit controller reduces the speed of a fan of the fan filter unit.