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发明名称
CHARGED PARTICLE EXTRACTION DEVICE AND METHOD
摘要
申请公布号
EP1683163(B1)
申请公布日期
2012.02.22
申请号
EP20040796047
申请日期
2004.10.16
申请人
FEI COMPANY;AUSTRALIAN NATIONAL UNIVERSITY
发明人
BOSWELL, RODERICK;SUTHERLAND, ORSON
分类号
H01J37/08;G21K;H01J27/02
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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