BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS,申请号KR20050055215-传众专利搜索

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发明名称	BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
摘要
申请公布号	KR101117054(B1)	申请公布日期	2012.02.22
申请号	KR20050055215	申请日期	2005.06.24
申请人		发明人
分类号	H01L21/3065;B44C1/22;C23C8/02;C23C8/10;C23F1/00;G03F7/42;H01J37/32	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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