发明名称 |
Optical device and exposure system equipped with optical device |
摘要 |
An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements. <IMAGE> |
申请公布号 |
AU2958699(A) |
申请公布日期 |
1999.10.18 |
申请号 |
AU19990029586 |
申请日期 |
1999.03.26 |
申请人 |
NIKON CORPORATION |
发明人 |
MASAYUKI MURAYAMA;KYOJI NAKAMURA;TARO OGATA;SUSUMU MORI |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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