发明名称 |
BEAM HEAD |
摘要 |
<p>The present embodiments relate to a beam head including a vacuum housing, in which an electron source is arranged. The beam head also includes a beam finger that is connected to the vacuum housing and has an outlet window at a distal end. The beam head includes a transformer housing, in which a transformer connected to the electron source is arranged. The transformer housing is arranged directly on the vacuum housing.</p> |
申请公布号 |
EP2419909(A1) |
申请公布日期 |
2012.02.22 |
申请号 |
EP20100716786 |
申请日期 |
2010.04.08 |
申请人 |
SIEMENS AG |
发明人 |
APEL, MANFRED;FIEBIGER, CLEMENS;HENNIG, WOLFGANG;SCHMIDT, ROLAND;OESTERREICHER, BJOERN |
分类号 |
G21K5/04;B65B3/04;B65B55/06;G21K5/00 |
主分类号 |
G21K5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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