发明名称 BEAM HEAD
摘要 <p>The present embodiments relate to a beam head including a vacuum housing, in which an electron source is arranged. The beam head also includes a beam finger that is connected to the vacuum housing and has an outlet window at a distal end. The beam head includes a transformer housing, in which a transformer connected to the electron source is arranged. The transformer housing is arranged directly on the vacuum housing.</p>
申请公布号 EP2419909(A1) 申请公布日期 2012.02.22
申请号 EP20100716786 申请日期 2010.04.08
申请人 SIEMENS AG 发明人 APEL, MANFRED;FIEBIGER, CLEMENS;HENNIG, WOLFGANG;SCHMIDT, ROLAND;OESTERREICHER, BJOERN
分类号 G21K5/04;B65B3/04;B65B55/06;G21K5/00 主分类号 G21K5/04
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