CAPACITIVE TYPE PRESSURE SENSOR AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A capacitive pressure sensor is provided to miniaturize a size by minimizing parasitic capacitance and to form a conductive sealing film in an anchor shape. CONSTITUTION: A capacitive pressure sensor comprises a substrate(110), a first insulating layer(111), a cavity(116), a second insulating layer(113), sealing films(117), and an upper electrode(115). The substrate is used as a lower electrode. The first insulating layer is formed on the substrate. The cavity is formed in the first insulating layer. The second insulating layer has an opening connected to the cavity and is formed on the first insulating layer to cover the cavity. The sealing films are formed using a conductive material. The upper electrode is electrically separated from the sealing films and is formed on the second insulating layer to be overlapped with the cavity.