发明名称 |
PROBE PIN FOR SEMICONDUCTOR TESTING EQUIPMENT |
摘要 |
PURPOSE: A probe pin for semiconductor inspection equipment is provided to form a plating layer of a hollow inner wall into stable and uniform state. CONSTITUTION: A hollow(21) is formed in inside of a body(20) and a plurality of control projections(22) is formed in an entrance of the hollow to an inner direction. A terminal pin(30) forms a pin rod(31) which is drawn in and out in the inner side of the hollow. The terminal pin forms a distance restraint groove(32) and restricts a distance which is drawn in and out in the hollow by a control projection. Both ends of a spring(40) are supported by the terminal pin and the body and give elasticity to drawing in and out drive of the pin rod. |
申请公布号 |
KR20120015527(A) |
申请公布日期 |
2012.02.22 |
申请号 |
KR20100077688 |
申请日期 |
2010.08.12 |
申请人 |
MICRO-TS CO., LTD. |
发明人 |
LEE, JU HWA;LEE, DONG SEOK |
分类号 |
G01R1/067;G01R31/26;H01L21/66 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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