发明名称 PROBE PIN FOR SEMICONDUCTOR TESTING EQUIPMENT
摘要 PURPOSE: A probe pin for semiconductor inspection equipment is provided to form a plating layer of a hollow inner wall into stable and uniform state. CONSTITUTION: A hollow(21) is formed in inside of a body(20) and a plurality of control projections(22) is formed in an entrance of the hollow to an inner direction. A terminal pin(30) forms a pin rod(31) which is drawn in and out in the inner side of the hollow. The terminal pin forms a distance restraint groove(32) and restricts a distance which is drawn in and out in the hollow by a control projection. Both ends of a spring(40) are supported by the terminal pin and the body and give elasticity to drawing in and out drive of the pin rod.
申请公布号 KR20120015527(A) 申请公布日期 2012.02.22
申请号 KR20100077688 申请日期 2010.08.12
申请人 MICRO-TS CO., LTD. 发明人 LEE, JU HWA;LEE, DONG SEOK
分类号 G01R1/067;G01R31/26;H01L21/66 主分类号 G01R1/067
代理机构 代理人
主权项
地址