发明名称 |
NEGATIVE ION SOURCE, ION BEAM ANALYSIS DEVICE, ETCHING DEVICE, OXYGEN RADICAL GENERATION DEVICE AND WASTE GAS PROCESSOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a negative ion source, an ion beam analysis device, an etching device, an oxygen radical generation device and an waste gas processor which can attain a large ion current by generating a surface-like negative ions by utilization of diamond semi-conductor device structure, with a diamond serving as a semi-conductor. SOLUTION: A negative ion source comprises: a diamond layer; a low resistance diamond layer which has a lower resistance than that of the diamond layer and is connected to the diamond layer; an electrode 3 which is formed on a surface where the low resistance layer in the diamond layer is not connected; a surface electrode 4 which can transmit a negative ion 12 formed on a surface that is not connected to the diamond layer in the low resistance diamond layer; and an extraction electrode 9 which is disposed in a thickness direction of the diamond layer at a distance from the surface electrode 4.
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申请公布号 |
JP2000285818(A) |
申请公布日期 |
2000.10.13 |
申请号 |
JP19990094354 |
申请日期 |
1999.03.31 |
申请人 |
KOBE STEEL LTD |
发明人 |
INOUE KENICHI;YOKOTA YOSHIHIRO;TACHIBANA TAKESHI;HAYASHI KAZUYUKI;KAWAKAMI NOBUYUKI;MIYATA KOICHI |
分类号 |
H01J27/20;H01J27/26;H01J37/08;(IPC1-7):H01J27/20 |
主分类号 |
H01J27/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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