| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion implating device capable of reducing metal pollution from a protection plate for protecting an inner wall of a beam passage. SOLUTION: A projected wall portion 28 vertically and substantially extending against the surface of a protection plate 27 and having a vertical wall surface 30 to which an unnecessary ion beam 11B is collided is continuously formed on the surface of a protection plate 27 along an extension direction of a beam passage. Thereby, when an unnecessary ion beam 11B is collided to a vertical wall surface 30 of a constitution particle of a wall surface generated accompanying with this is deposited on a surface of the protection plate 27 without flying toward the track of an ion beam 11A selected. Thereby, a metal pollution from the protection plate 27 can be reduced as compared with the conventional case.
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