发明名称 |
Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process |
摘要 |
A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance. |
申请公布号 |
US8120753(B2) |
申请公布日期 |
2012.02.21 |
申请号 |
US20070979839 |
申请日期 |
2007.11.08 |
申请人 |
BERGER GABRIEL;COSKUN TAMER;PARK SANGBONG;CHEN JANG FUNG;ASML MASKTOOLS B.V. |
发明人 |
BERGER GABRIEL;COSKUN TAMER;PARK SANGBONG;CHEN JANG FUNG |
分类号 |
G03B27/32;G03B27/54 |
主分类号 |
G03B27/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|