| 摘要 |
A device has a substrate, a piezo polymer layer arranged adjacent the substrate, a first electrode in contact with a first side of the layer, and a second electrode arranged adjacent the first electrode, such that when the piezo layer flexes, the first and second electrodes are arranged to detect one of a change in voltage or resistance, wherein at least one of the piezo polymer layer or the electrodes are deposited by printing. A method including depositing a spacer layer onto a substrate, depositing a piezo polymer layer onto the substrate, patterning an array of first electrodes in contact with the piezo polymer layer, and patterning an array of second electrodes adjacent the array of first electrodes, wherein depositing includes one of printing and laminating and pattering includes one of printing and etching. A method including laminating a piezo polymer layer onto a substrate, such that the layer forms at least one cantilever beam, forming a first electrode on one side of the layer, arranging a second electrode adjacent the first electrode, printing a polymer layer on the cantilever beam, and printing a proof mass on the cantilever beam. |
