发明名称 INSTRUMENTATION SYSTEM USING ALIGNMENT SCOPE AND METHOD FOR DETERMINING SYSTEM PARAMETERS OF ALIGNMENT SCOPE
摘要 PURPOSE: An instrumentation system using the alignment system and a method for determining a system variable are provided to accurately measure a location and posture information of a working object by determining s real system variable value of an alignment system according to an installation error. CONSTITUTION: A location of a reference mark, which is inscribed on a transfer table(100), is measured. The transfer table is transferred and an installation error of an alignment system(140) is obtained. The transfer table is transferred to a changed direction as much as an obtained installation error. A coordinate location of the reference mark either before or after transferring is obtained. A system variable of the alignment system is determined.
申请公布号 KR20120015043(A) 申请公布日期 2012.02.21
申请号 KR20100077255 申请日期 2010.08.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 AHN, SUNG MIN;YANG, SEUNG WON;SON, TAE KYU
分类号 H01L21/68;H01L21/66 主分类号 H01L21/68
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