发明名称 |
INSTRUMENTATION SYSTEM USING ALIGNMENT SCOPE AND METHOD FOR DETERMINING SYSTEM PARAMETERS OF ALIGNMENT SCOPE |
摘要 |
PURPOSE: An instrumentation system using the alignment system and a method for determining a system variable are provided to accurately measure a location and posture information of a working object by determining s real system variable value of an alignment system according to an installation error. CONSTITUTION: A location of a reference mark, which is inscribed on a transfer table(100), is measured. The transfer table is transferred and an installation error of an alignment system(140) is obtained. The transfer table is transferred to a changed direction as much as an obtained installation error. A coordinate location of the reference mark either before or after transferring is obtained. A system variable of the alignment system is determined.
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申请公布号 |
KR20120015043(A) |
申请公布日期 |
2012.02.21 |
申请号 |
KR20100077255 |
申请日期 |
2010.08.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
AHN, SUNG MIN;YANG, SEUNG WON;SON, TAE KYU |
分类号 |
H01L21/68;H01L21/66 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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