发明名称 |
Method and apparatus for MEMS oscillator |
摘要 |
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals. |
申请公布号 |
US8119432(B2) |
申请公布日期 |
2012.02.21 |
申请号 |
US20100944982 |
申请日期 |
2010.11.12 |
申请人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK;MIRADIA INC. |
发明人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK |
分类号 |
G04C3/08;H01L21/00 |
主分类号 |
G04C3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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