发明名称 Method of forming magnetic memory device
摘要 There are provided a magnetic memory device and a method of forming the magnetic memory device. The method of forming the magnetic memory device includes sequentially forming a first magnetic conductor, a tunnel barrier layer, and a second magnetic conductor on a substrate, forming a mask pattern on the second magnetic conductor, performing a primary etching of the second magnetic conductor by using the mask pattern as an etching mask, forming at least one spacer on sidewalls of the second magnetic conductor formed by the primary etching, and performing a secondary etching of the first magnetic conductor by using the mask pattern and the at least one spacers as an etching mask.
申请公布号 US8119425(B2) 申请公布日期 2012.02.21
申请号 US20100655862 申请日期 2010.01.08
申请人 CHO WOOJIN;HWANG JAESEUNG;CHOI SUKHUN;KIM DAE KYOM;KIM JUNGHYEON;SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO WOOJIN;HWANG JAESEUNG;CHOI SUKHUN;KIM DAE KYOM;KIM JUNGHYEON
分类号 H01L21/00 主分类号 H01L21/00
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