EVAPORATOR WITH HEATER INSERTED

摘要

PURPOSE: A heater imbedded evaporation source, which can simplify heater configuration of linear nozzle evaporation source, is provided to improve the heating efficiency of a heater and to reduce manufacturing costs and time. CONSTITUTION: A heater imbedded evaporation source comprises follows. A heater is built in a nozzle pipeline(20). The heater built in the nozzle pipeline comprises a conductor pipe(300) and an insulating powder. The heating element is settled in the conductor pipe. The insulating powder is filled in the space between the conductor pipe and the heating element. The heater built in the nozzle pipeline comprises the heating element and insulation pipe. The heating element is settled in the insulation pipe. The heating element is included of a resistance wire.