| 摘要 |
A table drive system comprising a first drive assembly configured for moving a support table in a first direction, a second drive assembly configured for moving the support table in a second direction, a third drive assembly configured for moving the support table in a third direction and a first drive motor coupled to the first drive assembly, the second drive assembly and the third drive assembly is provided. The first drive motor is configured to drive the first drive assembly, the second drive assembly and the third drive assembly.
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