发明名称 Integrated circuit packaging system with through via die having pedestal and recess and method of manufacture thereof
摘要 A method of manufacture of an integrated circuit packaging system includes: providing a structure having a via filled with conductive material completely through the structure, a recess, and a pedestal portion bordering the recess; mounting a semiconductor device inside the recess in the structure; and encapsulating the structure and the semiconductor device in an encapsulation.
申请公布号 US8119447(B2) 申请公布日期 2012.02.21
申请号 US20090486271 申请日期 2009.06.17
申请人 STATS CHIPPAC LTD. 发明人 PAGAILA REZA ARGENTY;DO BYUNG TAI;CHUA LINDA PEI EE
分类号 H01L21/44;H01L21/48;H01L21/50;H01L23/34;H01L23/48 主分类号 H01L21/44
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