发明名称 DRAM with nanofin transistors
摘要 One aspect of the present subject matter relates to a memory. A memory embodiment includes a nanofin transistor having a first source/drain region, a second source/drain region above the first source/drain region, and a vertically-oriented channel region between the first and second source/drain regions. The nanofin transistor also has a surrounding gate insulator around the nanofin structure and a surrounding gate surrounding the channel region and separated from the nanofin channel by the surrounding gate insulator. The memory includes a data-bit line connected to the first source/drain region, at least one word line connected to the surrounding gate of the nanofin transistor, and a stacked capacitor above the nanofin transistor and connected between the second source/drain region and a reference potential. Other aspects are provided herein.
申请公布号 US8119484(B2) 申请公布日期 2012.02.21
申请号 US20090353592 申请日期 2009.01.14
申请人 FORBES LEONARD;MICRON TECHNOLOGY, INC. 发明人 FORBES LEONARD
分类号 H01L21/336 主分类号 H01L21/336
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