SCANNING OPTICAL SYSTEM INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately inspect characteristics such as the shape or the position of an irradiated spot of a laser beam by eliminating the influence caused by relative speed and relative acceleration to the moving position or the scanning speed of a photodetector in a scanning optical system inspecting device for inspecting the scanning accuracy of the laser beam for forming an image. SOLUTION: This inspecting device is equipped with the photodetector 11 moving to travel in a main scanning direction so as to receive the laser beam R from an LD 101 scanned by a rotary polygon mirror 102 by a light receiving surface 11a, a separate distance measuring device 12 measuring the moving position of the photodetector 11, and a host computer 13 outputting a video on a monitor 14 by correcting the position and the shape of the irradiated spot of the laser beam R detected by the light receiving surface 11a based on the moving position of the photodetector 11.