DEVICE FOR HIGH-TEMPERATURE SEDIMENTATION OF SUPERCONDUCTIVE LAYERS

摘要

FIELD: electrical engineering. ^ SUBSTANCE: device contains sedimentation chamber with the window for laser radiation and the target made of the material for superconductive layer formation. The target in process of operation is irradiated with laser radiation. The sedimentation chamber is also outfitted with substrate heater and device for moving the substrate along the heater. Heater includes at least three heating elements of stainless steel. The heating elements are made in form of strips of woven net. Such design of heating element provides for homogenous electric parameters along the surface of heating elements. The width of each heating element surpasses the width of the band by 1.1/1.3 times. The gap between heating elements is no more than 0.2 of band width. Such size ratio provides for even temperature distribution in the evaporation zone. ^ EFFECT: increased reliability of the device, stability of its technological parameters and decreased operational expenses. ^ 4 cl, 3 dwg