| 摘要 |
PURPOSE: An RFID(Radio Frequency Identification) tag is provided to improve the efficiency and accuracy of analysis by accumulating a sensor chip on a filter layer by using an interleave method. CONSTITUTION: A sensor chips(221-224) are accumulated on an RFID chip by connecting to an RFID chip through bump interfaces(251, 252). Filter layers(231-234) filters a sensing source flew into the sensor chip by accumulating on the sensor chips. Antennas(261, 262) connected to the RFID chip through the bump interface. The sensor chip senses heat radiation, ionization, and vibration. The RFID chip transmits information sensed by the sensor chip to an external apparatus through the antenna.
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